측정범위(Z축) 600㎛ (0.6mm) 분해능 0.1nm(1Å) 측정력(Stylus) 1mgf ~ 50mgf (10μN~500μN) 스타일러스 팁 반경 2㎛, diamond,60deg Mag. : 2.5X, 5X ,10X, 20X, 50X, 100X Numerical Aperture(NA) : 0.075, 0.13, 0.3, 0.4, 0.55, 0.7 Working Distance(mm) : 10.3, 9.3, 7.4, 4.7, 3.4, 2.0 FOV(um) : 6910x5180,3460x2590,1730x1300,860x650,350x260,170x130 Optical Resolution(L&S 460nm) (um) : 1.87, 1.08, 0.47, 0.35, 0.26, 0.20 Vertical Re..
