| 측정범위(Z축) | 600㎛ (0.6mm) |
| 분해능 | 0.1nm(1Å) |
| 측정력(Stylus) | 1mgf ~ 50mgf (10μN~500μN) |
| 스타일러스 팁 반경 | 2㎛, diamond,60deg |
Mag. : 2.5X, 5X ,10X, 20X, 50X, 100X
Numerical Aperture(NA) : 0.075, 0.13, 0.3, 0.4, 0.55, 0.7
Working Distance(mm) : 10.3, 9.3, 7.4, 4.7, 3.4, 2.0
FOV(um) : 6910x5180,3460x2590,1730x1300,860x650,350x260,170x130
Optical Resolution(L&S 460nm) (um) : 1.87, 1.08, 0.47, 0.35, 0.26, 0.20
Vertical Resolution : Better than 0.01nm
Vertical RMS repeatability RMS : 0.01nm
HTSK(031-273-2438)